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Induced crystallization as a nonlithographic pattern transfer technique for nanofabrication

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Induced crystallization as a nonlithographic pattern transfer technique for nanofabrication

Auteurs : RBID : Pascal:02-0019691

Descripteurs français

Pascal (Inist)
- 8540H, Méthode mesure, Etude expérimentale, Nanotechnologie, Impression, Cristallisation.
Wicri :
- concept : Nanotechnologie.

English descriptors

KwdEn :
- Crystallization, Experimental study, Measuring methods, Nanotechnology, Printing.

Abstract

Controlled crystallization of amorphous films through nanoprinting is a novel pattern transfer technique that has been demonstrated for submicron features. Amorphous Ge and indium tin oxide (ITO) films are investigated for their suitability as a pattern transfer layer by direct contact with a patterned printhead. The printhead is heated and brought into contact with the amorphous film, transforming the contacted areas from amorphous to crystalline material. After crystallization, the amorphous regions are selectively etched away, leaving the desired pattern in crystalline material. Theoretical modeling suggests that this technique can be used for pattern transfer of features less than 50 nm. © 2001 American Vacuum Society.

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Le document en format XML

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<front><div type="abstract" xml:lang="en">Controlled crystallization of amorphous films through  nanoprinting  is a novel pattern transfer technique that has been demonstrated for submicron features. Amorphous Ge and indium tin oxide (ITO) films are investigated for their suitability as a pattern transfer layer by direct contact with a patterned printhead. The printhead is heated and brought into contact with the amorphous film, transforming the contacted areas from amorphous to crystalline material. After crystallization, the amorphous regions are selectively etched away, leaving the desired pattern in crystalline material. Theoretical modeling suggests that this technique can be used for pattern transfer of features less than 50 nm. © 2001 American Vacuum Society.</div>
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Induced crystallization as a nonlithographic pattern transfer technique for nanofabrication

Induced crystallization as a nonlithographic pattern transfer technique for nanofabrication

Descripteurs français

English descriptors

Abstract

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Le document en format XML

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